Journal of vacuum science and technology. materials, processing, measurement, & phenomena : JVST B. B, Nanotechnology & microelectronics
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| Previous Title: | Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online) |
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| Corporate Authors: | , |
| Format: | Electronic Journal |
| Language: | English |
| Published: |
New York, NY :
AVS through the American Institute of Physics
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| Subjects: | |
| Online Access: | Enlace del recurso |