Journal of vacuum science & technology. processing, measurement, and phenomena.

Journal of vacuum science & technology. processing, measurement, and phenomena. B, Microelectronics and nanometer structures

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Bibliographic Details
New Title:Journal of vacuum science and technology. B, Nanotechnology & microelectronics
Previous Title:Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Corporate Authors: American Vacuum Society, American Institute of Physics
Format: Electronic Journal
Language:English
Published: Woodbury, N.Y. : Published for the American Vacuum Society by the American Institute of Physics
Subjects:
Vacuum technology > Periodicals.
Microelectronics > Periodicals.
Nanostructured materials > Periodicals.
Vide (Technologie) > Périodiques.
Microélectronique > Périodiques.
Matériaux nanocristallins > Périodiques.
Microelectronics.
Nanostructured materials.
Vacuum technology.
Electronic journals.
Periodicals.
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